Pure and Agile

CSK PRODUCTS

Liquid Delivery System (LDS)

CSK’s effective precursor management system can help reduce waste and costs.

Engineer on LDS

Liquid Delivery System (LDS)

This system is specially designed to supply ultra-purity liquid precursors safely and continuously to the main tools used in the semiconductor manufacturing process.

A safer working and manufacturing environment is guaranteed with LDS’ various safety devices. CSK’s efficient precursor management solution will help avoid chemical waste and lower costs in all operations that are feasible.


tds-without background
  TDS

Dimension

Width

Depth

Height

No. of Stick

 

750mm

830mm

2,235mm

2/4 STICK

Precursor Properties

High vapor pressure precursors

Applicable Precursor
  • SiO2: TEOS, HCDS, DIPAS & etc.
  • Low-K: 4MS, OMTCS, ATRP & etc.
  • Metal: TiCI4, TDMAT
  • ACL H/ML: 1 - Hexane

Line Purge

(inside of pipe clean-out before canister exchange)

Purge gas(N2/Ar)
Bulk Canister Volume Up to 38 liters
Acquired Certification SEMI S2, Explosion-proof
TCT-without background
  TCT

Dimension

Width

Depth

Height

No. of Stick

 

1,300mm

680mm

2,185mm

3 STICK

Precursor Properties

Low vapor pressure precursors 

Pyrophoric precursors

Applicable Precursor
  • High-K Material: Zr source (TEMAZr, ZyALD & etc.), TEMAHf
  • Metal: USN-1, Star-ti
  • Highly flammable(pyrophoric): TMA

Line Purge

(inside of pipe clean-out before canister exchange)

Purge gas(N2/Ar)
Bulk Canister Volume Up to 20 liters
Acquired Certification SEMI S2, Explosion-proof

Do you have questions?

Get in contact with out CSK specialist